Title :
Polarization manipulation holographic lithography by single refracting prism
Author :
Man Wu ; Yi Xu ; Xiaoxu Lu ; Sheng Lan ; Lijun Wu
Author_Institution :
Sch. for Inf. & Optoelectron. Sci. & Eng., South China Normal Univ., Guangzhou, China
Abstract :
We propose a simple but effective strategy for polarization manipulation holographic lithography by single refractive prism. By tuning the polarization of single laser beam, we simply obtain a pill shape interference pattern where multiple modulated beams are needed in conventional holography lithography. Fabrication of large area pill shape two-dimensional polymer photonic crystals template using one beam and one shoot holography lithography is shown as an example. This integrated fabrication technique, for example, can release the crucial stability restrictions imposed on the multiple beams holography lithography.
Keywords :
holography; lithography; optical fabrication; optical prisms; photonic crystals; integrated fabrication technique; pill shape interference pattern; polarization manipulation holographic lithography; polymer photonic crystal template; single laser beam; single refracting prism; single refractive prism;
Conference_Titel :
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-6274-0