Design of automated experiment management system with applications to R&D and large volume semiconductor manufacturing

Author

Jun, Kyoung Shik ; Ellenberg, Siegmar ; Carlier, Antoin ; Lee, Yong Ho

Author_Institution

Applied Mater. Inc., Santa Clara, CA

fYear

2005

fDate

13-15 Sept. 2005

Firstpage

315

Lastpage

318

Abstract

This paper will explain the design methodology of automated experiment management systems applicable to both semiconductor R&D and manufacturing processes. The latest advanced R&D and high volume manufacturing sites require more flexibility modifying experimental processes with wafers. This is due to integrated and specific process design test needs without increasing cycle time and cost. The automated experiment management design method will be demonstrated by using a manufacturing execution system (MES), called Applied FAB300reg

Keywords

design of experiments; integrated circuit manufacture; manufacturing processes; process design; production engineering computing; production management; research and development; Applied FAB300reg; automated experiment management system; manufacturing execution system; process design test; research and development; semiconductor manufacturing; wafers; Design methodology; Engineering management; Fabrication; Manufacturing automation; Manufacturing processes; Production; Research and development; Research and development management; Semiconductor device manufacture; Semiconductor materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Conference_Location

San Jose, CA

Print_ISBN

0-7803-9143-8

Type

conf

DOI

10.1109/ISSM.2005.1513366

Filename

1513366