System design for micropositioning and sensing of micro-electromechanical (MEM) actuators

Author

Madanagopal, K.V. ; Tien, Norman C.

Author_Institution

Dept. of Electr. Eng., Cornell Univ., Ithaca, NY, USA

Volume

3

fYear

2000

fDate

2000

Firstpage

1204

Abstract

We present the system design and open loop positioning of a large displacement (~25 μm), single crystal silicon, folded spring lateral actuator. The static and dynamic characteristics of the actuator are measured and the actuator resembles a linear, mass-spring-damper second order system. The 25 μm static displacement is obtained at 68 V. Dynamic positioning is demonstrated by an open loop displacement stepping of 13 μm

Keywords

elemental semiconductors; feedback; microactuators; micropositioning; silicon; 13 μm step; 13 mum; 25 μm static displacement; 25 mum; 68 V; Si; displacement; dynamic characteristics; dynamic positioning; folded spring lateral actuator; mass-spring-damper; micro-electromechanical actuators; micropositioning; open loop displacement; open loop positioning; second order model; single crystal silicon; static characteristics; Capacitance; Disk drives; Electrodes; Fingers; Hydraulic actuators; Optical films; Optical sensors; Silicon; Springs; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2000. IMTC 2000. Proceedings of the 17th IEEE

Conference_Location

Baltimore, MD

ISSN

1091-5281

Print_ISBN

0-7803-5890-2

Type

conf

DOI

10.1109/IMTC.2000.848669

Filename

848669