High-resolution EUV imaging using high harmonic generation
Author :
Libertun, A.R. ; Zhang, X. ; Paul, A. ; Raymondson, D. ; Gershgoren, E. ; Gagnon, E. ; Backus, S. ; Murnane, M.M. ; Kapteyn, Henry C. ; Bartels, R.A. ; Liu, Y. ; Attwood, D.T.
Author_Institution :
Colorado Univ., Boulder, CO
fYear :
2004
fDate :
21-21 May 2004
Firstpage :
946
Lastpage :
947
Abstract :
We use a simple set-up consisting of two multilayer mirrors and a hollow fiber EUV light source to obtain high-resolution EUV images. Magnifications of X20 and X50 are demonstrated