Title :
Influence of non-uniform, surface mechanical loads over vibrational spectra of BAW piezoelectric resonators
Author :
Crisan, Silviu ; Budura, Adrian ; Pop, Eugen
Author_Institution :
Sch. of Inf. Technol. & Eng., Ottawa Univ., Ont., Canada
Abstract :
The correlation between the surface vibrational energy, the application point of the mechanical perturbation and the resonating frequency shift is analytically proved using Tiersten first order perturbation theory and a local one dimensional model for the estimation of the surface mechanical impedance. The simulation results are shown to be in a good concordance with the experimental results
Keywords :
bulk acoustic wave devices; crystal resonators; digital simulation; perturbation theory; vibrations; AT quartz resonator; BAW piezoelectric resonators; Tiersten first order perturbation theory; elastic wire electrode; local onedimensional model; mechanical perturbation; resonating frequency shift; surface mechanical impedance; surface vibrational energy; vibrational spectra; Acoustic waves; Acoustical engineering; Electrodes; Information technology; Piezoelectric films; Resonant frequency; Solid modeling; Surface acoustic wave devices; Surface impedance; Vibrations;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2000. IMTC 2000. Proceedings of the 17th IEEE
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-5890-2
DOI :
10.1109/IMTC.2000.848704
