Research on multi-parameter transducer and Integrated Measurement System (IMS)

Author

Zhang, Wendong ; Dong, Haifeng ; Xiong, Jijun ; Xiong, Shenshu

Author_Institution

North China Inst. of Technol., Shanxi, China

Volume

3

fYear

2000

fDate

2000

Firstpage

1453

Abstract

In this paper, a novel high-g monolithic three-dimensional accelerometer is demonstrated, which separate coupled accelerations mechanically through eight parallel beams. The integration of the accelerometer with pressure and tempreture sensor is also demonstrated. The detailed structure design, simulation, manufacture process, package as well as the final testing results are presented. The Integrated Measurement System (IMS) consists of the transducer and an ASIC (TH9801), which is developed for the special application such as weapon, aviation, spaceflight, missile, automotive testing etc.. Two typical applications of the system are demonstrated in the end

Keywords

accelerometers; application specific integrated circuits; circuit CAD; finite element analysis; semiconductor device manufacture; transducers; ASIC; Integrated Measurement System; TH9801; automotive testing; aviation; design; high-g monolithic three-dimensional accelerometer; manufacture; missile; multi-parameter transducer; simulation; spaceflight; weapon; Acceleration; Accelerometers; Manufacturing processes; Optical coupling; Packaging; Particle beams; Process design; Testing; Transducers; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2000. IMTC 2000. Proceedings of the 17th IEEE

Conference_Location

Baltimore, MD

ISSN

1091-5281

Print_ISBN

0-7803-5890-2

Type

conf

DOI

10.1109/IMTC.2000.848715

Filename

848715