Title :
Improvement of particle outbreak for chamber wall deterioration
Author :
Kawabata, Youichirou ; Watanabe, Munenori ; Ohtake, Koji ; Yajima, Teruo ; Endou, Minoru ; Aoyama, Masaaki ; Imaoka, Kazunori
Author_Institution :
Spansion LLC, Fukushima, Japan
Abstract :
We used fault detect and classification (FDC) application to collect sensor´s data of tool. The origin of particles is specified by correlating the data with plasma parameters. We proved particles were caused by the deterioration of chamber wall. The deterioration is the coat of Al alumilite peels off from chamber wall. After recoating the coat of Al alumilite on chamber wall, the outbreak of particles reduced.
Keywords :
fault diagnosis; integrated circuit manufacture; sputter etching; alumilite; chamber wall deterioration; fault classification; fault detection; particle outbreak; Ceramics; Constitution; Data mining; Etching; Fault detection; Particle measurements; Plasma applications; Plasma measurements; Semiconductor devices; Voltage;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513412
