Title :
Multiple air-gap InP-based VCSELs and filters with ultra-wide wavelength tuning-flexibility and shape of the membranes
Author :
Daleiden, J. ; Irmer, S. ; Tarraf, A. ; Romer, F. ; Prott, C. ; Ataro, E. ; Strassner, M. ; Hillmer, H.
Author_Institution :
Inst. of Microstructure Technol. & Anal., Kassel Univ., Germany
Abstract :
Vertical cavity devices that comprise of multiple air-gaps and extremely thin InP membranes implemented by surface micromachining is presented. Both, for the tunable cavity and for the distributed Bragg reflector (DBR) mirrors the material module InP/air is applied. This design facilitates improved opto-mechanical device performance. With the same technological concept, a 1.55 μm micromachined optical filter with an ultracontinuous wavelength tuning is fabricated and characterized. An 8-air-gap 1.55 μm VCSEL structure is also implemented.
Keywords :
III-V semiconductors; distributed Bragg reflectors; indium compounds; laser cavity resonators; laser mirrors; laser tuning; membranes; micro-optics; micromachining; optical fabrication; optical filters; optical testing; quantum well lasers; surface emitting lasers; 1.55 mum; InP; InP-based VCSEL; distributed Bragg reflector mirrors; micromachined optical filter; multiple air-gap VCSEL; opto-mechanical device performance; surface micromachining; thin InP membranes; tunable cavity; ultrawide wavelength tuning; vertical cavity devices; Air gaps; Biomembranes; Distributed Bragg reflectors; Filters; Indium phosphide; Micromachining; Optical surface waves; Shape; Ultraviolet sources; Vertical cavity surface emitting lasers;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233456
