Title :
47 nm tuning of thermally actuated Fabry-Perot tunable filter with very low power consumption
Author :
Myung-Lae Lee ; Chi-Hoon Jun ; Youn Tae Kim
Abstract :
A thermally actuated GaAs-based wavelength tunable filter with 7.64-μm-thick suspended structure is presented. Wide tuning range of 74 nm is achieved with the low driving voltage 4.6 V and the power consumption of 4.97 mW.
Keywords :
III-V semiconductors; gallium arsenide; microactuators; optical design techniques; optical fabrication; optical filters; optical testing; optical tuning; 4.6 V; 4.97 mW; 47 nm; 7.64 mum; Fabry-Perot tunable filter; GaAs; GaAs-based filter; power consumption; thermally actuated filter; wide tuning range; Bridge circuits; Distributed Bragg reflectors; Energy consumption; Fabrication; Fabry-Perot; Mirrors; Optical filters; Resonance; Wavelength division multiplexing; Wet etching;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233457
