Title :
High performance low cost microphones utilising micro-optical technology
Author :
Fismen, B.G. ; Sagberg, H. ; Johansen, I.-R. ; Bakke, KA H.
Author_Institution :
SINTEF, Oslo, Norway
Abstract :
Two micro-optical microphone principles have been realised. The first is based on a self-aligning Fabry-Perot cavity with a LED. The second is based on a diffractive lens, a reflecting membrane and a fiber.
Keywords :
Fabry-Perot resonators; lenses; light emitting diodes; membranes; micro-optics; microphones; optical fibres; LED; diffractive lens; fiber; micro-optical technology; microphones; reflecting membrane; self-aligning Fabry-Perot cavity; Biomembranes; Costs; Detectors; Fabry-Perot; Lenses; Light emitting diodes; Microphones; Optical sensors; Optical surface waves; Silicon;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233466
