Title :
Microelectromechanical VOA design for high shock-tolerance and low temperature-dependence
Author :
Isamoto, Keiji ; Kato, Kazuya ; Morosawa, Atsushi ; Chong, Changho ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
Santec Corp., Aichi, Japan
Abstract :
We report a novel tilt mirror mechanism for microelectromechanical variable optical attenuators of fast response (1 kHz) and low voltage operation (5 V) along with an improved design for low temperature dependence and high shock tolerance.
Keywords :
electrostatic actuators; micromirrors; optical attenuators; optical design techniques; thermal stability; vibrations; 1 kHz; 5 V; microelectromechanical VOA design; shock-tolerance; tilt mirror mechanism; variable optical attenuators; Electrostatic actuators; Low voltage; Micromechanical devices; Mirrors; Optical attenuators; Optical design; Optical fibers; Packaging; Silicon; Temperature dependence;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233492
