DocumentCode
2094110
Title
Fabrication and some measurement of a digital variable optical attenuator
Author
Sun, W. ; Munghal, M.J. ; Noell, W. ; Perez, F. ; Riza, N.A. ; de Rooij, Nico
Author_Institution
Inst. of Microtechnol., Neuchatel Univ., Switzerland
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
115
Lastpage
116
Abstract
Arrays of sixteen micromirrors featuring 1 μm-wide structures have been fabricated based on SOI technology. Assembled prototypes can be actuated at about 70 V. Tilt angles, surface flatness, and some optical data of certain mirrors are measured.
Keywords
electrostatic actuators; microassembling; micromirrors; optical arrays; optical attenuators; optical fabrication; optical variables measurement; silicon-on-insulator; 1 mum; SOI technology; digital variable optical attenuator; micromirrors; optical fabrication; optical measurement; Assembly; Attenuation measurement; Electrodes; Mirrors; Optical attenuators; Optical device fabrication; Optical fiber networks; Optical sensors; Power amplifiers; Stimulated emission;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233493
Filename
1233493
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