Title :
Driving of optical fiber by surface-micromachined cam-micromotor for the applications to variable optical attenuator
Author :
Kanamori, Y. ; Aoki, Y. ; Sasaki, M. ; Hosoya, H. ; Wada, A. ; Hane, K.
Author_Institution :
Dept. of Mechatronics & Precision Eng., Tohoku Univ., Sendai, Japan
Abstract :
This paper discusses the fabrication of a novel variable optical attenuator (VOA). In this device, an optical fiber is directly driven by a cam-micromotor. The performance of the cam-micromotor and the coupling efficiency between two fibers are also examined.
Keywords :
micro-optics; micromachining; micromotors; optical attenuators; optical fibre couplers; optical fibre fabrication; cam-micromotor; coupling efficiency; optical fabrication; optical fiber driving; surface-micromachining; variable optical attenuator; Etching; Frequency; Helium; Mechatronics; Optical attenuators; Optical fibers; Optical surface waves; Stators; Voltage; Wavelength division multiplexing;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233495
