High positioning accuracy of a dual-axis feeding system enhanced by using error compensation methods for UV laser processing system

Author

Hsiao, Wen-Tse ; Tseng, Shih-Feng ; Chiang, Donyau ; Huang, Kuo-Cheng ; Chen, Ming-fei

Author_Institution

Instrum. Technol. Res. Center, Nat. Appl. Res. Labs., Hsinchu, Taiwan

fYear

2011

fDate

10-12 May 2011

Firstpage

1

Lastpage

4

Abstract

Precision motion stage was an important component for the instrument control system, especially applied in the advanced manufacturing and inspecting systems. This article presented the positioning accuracy of a dual-axis feeding system enhanced by using a laser interferometer for error measurement and compensation. Based on a least-square theorem, one dimensional fitting function was used to compensate dual-axis error values. After the compensation experiments of 1 mm measured interval, the positioning accuracy of X- and Y-axis feeding system increased from 11.5 μm to 5.7 μm and from 26.2 μm to 3.4 μm, respectively. Moreover, the positioning accuracy of X- and Y-axis feeding system with the measured interval of 10 mm increased from 9.9 μm to 5.5 μm and from 24.7 μm to 1.6 μm, respectively. By using this approach, the positioning accuracy was enhanced to 44.4 % and 87 % in X- and Y-axis moving stage, respectively.

Keywords

curve fitting; least squares approximations; light interferometers; motion measurement; position measurement; UV laser processing system; dimensional fitting function; dual-axis feeding system; error compensation method; high positioning accuracy; instrument control system; laser interferometer; least-square theorem; precision motion stage; size 11.5 mum to 5.7 mum; size 24.7 mum to 1.6 mum; size 26.2 mum to 3.4 mum; size 9.9 mum to 5.5 mum; Accuracy; Curve fitting; Error compensation; Measurement by laser beam; Measurement uncertainty; Position measurement; Software measurement; error compensation; one dimensional fitting function; positioning accuracy; positioning error;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference (I2MTC), 2011 IEEE

Conference_Location

Binjiang

ISSN

1091-5281

Print_ISBN

978-1-4244-7933-7

Type

conf

DOI

10.1109/IMTC.2011.5944028

Filename

5944028