The Analysis and Optimum Design on Compliant Micro-Gripper with Micro-Force Sensor

Force sensing and control plays an important role in manipulation control especially in MEMS when the contact force exerted on the object should be carefully monitored. Strain gauges are widely used and often placed at the maximum stress point according to static analysis to enable higher sensitivity. However, the vibration induced by the external force will cause a distortion in the sensor signal that it can no longer reflect the contact force, in other words, it loses the capacity of invertibility, therefore dynamic analysis should be introduced. An optimum sensor arrangement regarding the micro-gripper with uneven section is presented in the paper.