Title :
Electrostatic actuation of 3-D MEMS mirrors by sidewall electrodes
Author :
Chu, Peter ; Shi-Sheng Lee ; Peale, D. ; Bonadeo, N. ; Brener, Igal
Abstract :
We have successfully demonstrated sidewall-electrode actuation of 3-D MEMS mirrors. Improved actuation linearity and reduction of the spring-softening effect are achieved. Sidewall actuation enables better mirror dynamics including large snap-down angles, reduced driving voltages, and fast switching times.
Keywords :
electrodes; electrostatic actuators; micromirrors; microswitches; optical switches; 3-D MEMS mirrors; electrostatic actuation; mirror dynamics; sidewall actuation; sidewall electrodes; spring-softening effect; switching; Electrodes; Electrostatic actuators; Linearity; Micromechanical devices; Mirrors; Optical sensors; Resonance; Resonant frequency; Torque; Voltage;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233500
