DocumentCode
2094367
Title
Torsional mirror with X-shaped cross-sectional torsional beam
Author
Yasuda, S. ; Kato, T. ; Torashima, K. ; Shimada, Y. ; Yagi, T.
Author_Institution
Canon Res. Center, Canon Inc., Tokyo, Japan
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
133
Lastpage
134
Abstract
The development of a MEMS torsional mirror with X-shaped cross-sectional torsional beam is presented in this paper. The torsional resonant mode of the torsional mirror was designed to be the lowest resonant mode. Therefore, vertical and horizontal movements of the mirror were reduced. This torsional mirror has been fabricated using anisotropic etching from both sides of Si (100) wafer.
Keywords
elemental semiconductors; etching; micromechanical devices; micromirrors; optical design techniques; optical fabrication; silicon; torsion; MEMS torsional mirror; Si; Si (100) wafer; X-shaped torsional beam; anisotropic etching; cross-sectional torsional beam; torsional mirror; torsional resonant mode; Anisotropic magnetoresistance; Etching; Fabrication; Frequency measurement; Microscopy; Mirrors; Nonhomogeneous media; Piezoelectric actuators; Resonance; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233502
Filename
1233502
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