Title :
Torsional mirror with X-shaped cross-sectional torsional beam
Author :
Yasuda, S. ; Kato, T. ; Torashima, K. ; Shimada, Y. ; Yagi, T.
Author_Institution :
Canon Res. Center, Canon Inc., Tokyo, Japan
Abstract :
The development of a MEMS torsional mirror with X-shaped cross-sectional torsional beam is presented in this paper. The torsional resonant mode of the torsional mirror was designed to be the lowest resonant mode. Therefore, vertical and horizontal movements of the mirror were reduced. This torsional mirror has been fabricated using anisotropic etching from both sides of Si (100) wafer.
Keywords :
elemental semiconductors; etching; micromechanical devices; micromirrors; optical design techniques; optical fabrication; silicon; torsion; MEMS torsional mirror; Si; Si (100) wafer; X-shaped torsional beam; anisotropic etching; cross-sectional torsional beam; torsional mirror; torsional resonant mode; Anisotropic magnetoresistance; Etching; Fabrication; Frequency measurement; Microscopy; Mirrors; Nonhomogeneous media; Piezoelectric actuators; Resonance; Silicon compounds;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233502
