MEMS fiber-optic variable optical attenuator using collimating lensed fiber

Author

Kim, Che-Heung ; Park, Jaehyoung ; Park, Namkyoo ; Kim, Yong-Kweon

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea

fYear

2003

fDate

18-21 Aug. 2003

Firstpage

145

Lastpage

146

Abstract

A reflective type MEMS VOA using lensed fiber-coupling scheme was fabricated. A linear bi-directional comb actuator is used to translate vertical mirror to improve attenuation characteristics in small attenuation range. Various coupling loss factors are analyzed by CODE V. The insertion loss of the fabricated VOA is 0.98 dB. The PDL measurement shows good uniformity in broad attenuation range. The maximum value of PDL is 0.24 dB. The wavelength dependency of VOA is measured below 0.7 dB in whole attenuation range and the return loss is -38 dB.

Keywords

electrostatic actuators; lenses; micromirrors; optical attenuators; optical collimators; optical fabrication; optical fibre couplers; optical fibre losses; -38 dB; 0.9 dB; CODE V; MEMS; attenuation characteristics; bidirectional comb actuator; collimating lensed fiber; coupling loss; fiber-optic variable optical attenuator; insertion loss; lensed fiber-coupling scheme; optical fabrication; vertical mirror; Attenuation measurement; Bidirectional control; Hydraulic actuators; Micromechanical devices; Optical attenuators; Optical collimators; Optical fibers; Optical losses; Page description languages; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2003 IEEE/LEOS International Conference on

Print_ISBN

0-7803-7830-X

Type

conf

DOI

10.1109/OMEMS.2003.1233508

Filename

1233508