• DocumentCode
    2094628
  • Title

    A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

  • Author

    Hah, Dooyoung ; Choi, Chang-Auck ; Jun, Chi-Hoon ; Kim, Youn Tae

  • Author_Institution
    Basic Res. Lab., Electron. & Telecommun. Res. Inst., Daejeon, South Korea
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    151
  • Lastpage
    152
  • Abstract
    A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of ±1.4° at 66 VDC was achieved for a 1-mm-diameter micromirror.
  • Keywords
    electrostatic actuators; micromachining; micromirrors; optical design techniques; optical fabrication; optical scanners; optical testing; 1 mm; 66 V; mechanical tilt; optical fabrication; optical testing; scanning micromirrors; self-aligned vertical comb-drive actuator; surface micromachining; Actuators; Etching; Fabrication; Fingers; Micromachining; Micromirrors; Mirrors; Optical microscopy; Silicon on insulator technology; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233511
  • Filename
    1233511
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2094628