• DocumentCode
    2094660
  • Title

    Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

  • Author

    Sawada, Renshi ; Yamaguchi, Johji ; Higurashi, Eiji ; Shimizu, Akira ; Yamamoto, Tsuyoshi ; Takeuchi, Nobuyuki ; Uenishi, Yuji

  • Author_Institution
    NTT Microsystem Integration Labs., NTT Corp., Kanagawa, Japan
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    153
  • Lastpage
    154
  • Abstract
    This paper describes improvements made to a single-crystal mirror actuated electrostatically by terraced electrodes with a high-aspect ratio torsion spring. The improvements are reduced mirror pitch, increased mirror size, and higher stability from the electrical viewpoint.
  • Keywords
    electrodes; electrostatic actuators; micromirrors; optical design techniques; optical testing; torsion; electrostatic actuation; mirror pitch; mirror size; single crystalline mirror; stability; terraced electrodes; torsion spring; Collimators; Crystallization; Electrodes; Fluctuations; Micromechanical devices; Mirrors; Optical arrays; Optical switches; Springs; Stability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233512
  • Filename
    1233512
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2094660