Title :
Two-axis scanning mirror for free-space optical communication between UAVs
Author :
Zhou, Lixia ; Last, Mathew ; Milanovic, Veljko ; Kahn, Joseph M. ; Pister, Kristofer S J
Author_Institution :
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Abstract :
We have developed a SOI/SOI wafer bonding process to design and fabricate two-axis scanning mirrors with excellent performance. These mirrors are used to steer laser beams in free-space optical communication between UAVs.
Keywords :
beam steering; laser beams; micromechanical devices; micromirrors; optical communication equipment; optical design techniques; optical fabrication; optical links; optical scanners; silicon-on-insulator; wafer bonding; SOI/SOI wafer bonding; Si; UAV; free-space optical communication; laser beam steering; optical design; optical fabrication; two-axis scanning mirror; Actuators; Electric shock; Etching; Micromirrors; Mirrors; Optical fiber communication; Optical sensors; Process design; Unmanned aerial vehicles; Wafer bonding;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233514
