DocumentCode
2094852
Title
Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology
Author
Choo, Hyuck ; Muller, Richard S.
Author_Institution
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
169
Lastpage
170
Abstract
High-precision microlenses with excellent optical characteristics is described. The lenses are formed precisely at desired locations on a wafer using a polymer-jet system in which hydrophobic effects define the lens diameter and surface tension creates a high-quality optical surface. This hybrid method enables researchers to define the locations and diameters of microlenses with ±1 μm precision as well as to control the curvatures of the microlenses accurately.
Keywords
microlenses; optical fabrication; optical polymers; optical testing; hydrophobic effects; lens curvature; microlenses; optical properties; optical surface; polymer-jet-printing technology; surface tension; Adaptive optics; Lenses; Microoptics; Optical arrays; Optical polymers; Optical sensors; Optical surface waves; Printing; Rough surfaces; Surface tension;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233519
Filename
1233519
Link To Document