Title :
Micromachined polarization beam splitters for the visible spectrum
Author :
Gupta, Kishan ; Choo, Hyuck ; Kim, Hanjun ; Muller, Richard S.
Author_Institution :
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Abstract :
Batch-processed polarization beam splitters (PBS) are built and characterized. PBS are important optical components used to separate the orthogonal TE and TM components of light. The devices are fabricated from thin-film, low-stress silicon nitride membranes and showed excellent performance. By stacking membranes and a triple-layer, PBS produce extinction ratios of 21 and 16 dB for reflected and transmitted light rays, respectively.
Keywords :
dielectric thin films; light polarisation; membranes; micro-optics; micromechanical devices; optical beam splitters; optical fabrication; optical testing; silicon compounds; visible spectra; SiN; batch-processing; micromachining; optical components; orthogonal TE component; orthogonal TM component; polarization beam splitters; reflected light rays; silicon nitride membranes; silicon nitride thin-film; transmitted light rays; visible spectrum; Biomembranes; Extinction ratio; Insertion loss; Optical beam splitting; Optical films; Optical polarization; Semiconductor thin films; Silicon; Tellurium; Thin film devices;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233520
