Title :
Design and fabrication of low-refractive-index polymeric photonic crystal nanobeam structures
Author :
Zi-Ming Meng ; Yi-Hua Hu ; Zhi-Yuan Li
Author_Institution :
Sch. of Phys. & Optoelectron. Eng., Guangdong Univ. of Technol., Guangzhou, China
Abstract :
The design of high-Q polymeric photonic crystal nanobeam microcavities is studied based on the three-dimensional finite-difference time-domain method. Experimentally the fabrication method of air-bridged polymeric photonic crystal nanobeam structures is presented using focused ion beam etching and wet chemical etching.
Keywords :
finite difference time-domain analysis; focused ion beam technology; microcavities; nanophotonics; optical design techniques; optical fabrication; optical polymers; photonic crystals; refractive index; sputter etching; air-bridged polymeric photonic crystal nanobeam structures; focused ion beam etching; high-Q polymeric photonic crystal nanobeam microcavities; low-refractive-index polymeric photonic crystal nanobeam structures; three-dimensional finite-difference time-domain method; wet chemical etching;
Conference_Titel :
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-6274-0
