Title :
New type small-angle sensor based on the surface plasmon resonance technology in heterodyne interferometry
Author :
Wang, Shinn-Fwu ; Kao, Fu-Hsi ; Liu, An-Li ; Chiu, Jyh-Shyan ; Lai, Wesley ; Hsieh, Meng-Feng ; Chung, Hung-Chen
Author_Institution :
Dept. of Electron. Eng., Ching Yun Univ., Jhongli, Taiwan
Abstract :
In the paper, a new type small-angle sensor based on the surface plasmon resonance (SPR) Technology in heterodyne interferometry (HI) is proposed. The sensing unit is a prism assembly that is composed of a half-wave (λ/2) plate, two right-angle prisms and two rotation stages. As a heterodyne optical source passes through this experimental structure, we can achieve the small rotation angle only by measuring the variation in phase difference between p- and s-polarizations. The resolution of the system can approximately reach 1.06×10-8 radian at least. The new instrument has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.
Keywords :
angular measurement; interferometry; light sources; optical prisms; optical retarders; phase measurement; plasmons; sensors; SPR technology; half-wave plate; heterodyne interferometry; heterodyne optical source; p-polarization; phase difference variation measurement; prism assembly; right angle prism; s-polarizations; small-angle sensor; surface plasmon resonance technology; Optical interferometry; Optical mixing; Optical reflection; Optical sensors; Plasmons; Pollution measurement; Attenuated total-internal reflections (ATR); Heterodyne interferometry (HI); Kretchmann´s configuration; Small angle measurement; Surface plasmon resonance (SPR);
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2011 IEEE
Conference_Location :
Binjiang
Print_ISBN :
978-1-4244-7933-7
DOI :
10.1109/IMTC.2011.5944068
