Title :
Highly-sensitive optical waveguide sensor based on SiON using two cascaded-microring resonators
Author :
Luping Zhu ; Mingyu Li ; Junjun Ye ; Jian-Jun He
Author_Institution :
State Key Lab. of Modern Opt. Instrum., Zhejiang Univ., Hangzhou, China
Abstract :
A waveguide sensor using two cascaded micro-ring resonators based on silicon oxynitride (SiON) waveguide was investigated. The refractive index change of 2.9×10-7 can be measured through intensity interrogation with a low-cost broadband light source.
Keywords :
integrated optics; micro-optics; optical resonators; optical sensors; optical waveguides; refractive index; silicon compounds; SiON; broadband light source; cascaded-microring resonators; highly-sensitive optical waveguide sensor; intensity interrogation; refractive index change; silicon oxynitride waveguide;
Conference_Titel :
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-6274-0
