Title :
Silicon nanowire waveguide sensor based on two cascaded ring resonators
Author :
Xianxin Jiang ; Lei Jin ; Mingyu Li ; Jian-Jun He
Author_Institution :
Dept. of Opt. Eng., Zhejiang Univ., Hangzhou, China
Abstract :
We report the latest experimental results of cascaded double ring sensor. To improve the sensitivity, nanowire waveguide sensor operating in TM polarization is designed and fabricated, with the help of the e-beam lithography system. The measured transmission spectrum shows good agreement with theoretical analysis.
Keywords :
electron beam lithography; integrated optics; nanofabrication; nanophotonics; nanosensors; nanowires; optical design techniques; optical fabrication; optical resonators; optical sensors; optical waveguides; silicon; Si; TM polarization; cascaded ring resonators; e-beam lithography; optical design; optical fabrication; sensitivity; silicon nanowire waveguide sensor; transmission spectrum;
Conference_Titel :
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-6274-0
