Title :
Electrostatic analysis of carbon nanotube arrays
Author :
Wang, Xinlin ; Wong, Hon-Sum Philip ; Oldiges, Phil ; Miller, Robert J.
Author_Institution :
Microelectron. Div., Semicond. Res. & Dev. Center, Hopewell Junction, NY, USA
Abstract :
In order to improve the performance of carbon nanotube field effect transistors (CNFETs), a nanotube array should be used. For a densely packed array of nanotubes, screening by nearby tubes affects the capacitance per tube. The gate-to-channel capacitance for a nanotube array of three different gate electrode configurations was examined in this study. Simulation results show that a wrap-around gate gives the largest gate-to-channel capacitance among the three gate configurations. A bottom gate structure, in which carbon nanotubes are unpassivated, presents a distinct electrostatic disadvantage of the weakest gate control. For a top gate structure, we found that an optimum design point exists for the pitch, which is defined as the distance between the centers of adjacent nanotubes, to get the largest gate capacitance per unit area.
Keywords :
arrays; capacitance; carbon nanotubes; electrostatics; field effect transistors; nanotube devices; semiconductor device models; C; bottom gate structure; capacitance; carbon nanotube arrays; carbon nanotube field effect transistors; densely packed array; electrostatic analysis; gate electrode; gate-to-channel capacitance; nanotube array; optimum design point; screening; top gate; wrap-around gate; Capacitance; Carbon nanotubes; Dielectrics; Electrodes; Electrostatic analysis; FETs; Integrated circuit technology; Microelectronics; Research and development; Silicon;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003. International Conference on
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7826-1
DOI :
10.1109/SISPAD.2003.1233662