DocumentCode
2096145
Title
Electrostatic analysis of carbon nanotube arrays
Author
Wang, Xinlin ; Wong, Hon-Sum Philip ; Oldiges, Phil ; Miller, Robert J.
Author_Institution
Microelectron. Div., Semicond. Res. & Dev. Center, Hopewell Junction, NY, USA
fYear
2003
fDate
3-5 Sept. 2003
Firstpage
163
Lastpage
166
Abstract
In order to improve the performance of carbon nanotube field effect transistors (CNFETs), a nanotube array should be used. For a densely packed array of nanotubes, screening by nearby tubes affects the capacitance per tube. The gate-to-channel capacitance for a nanotube array of three different gate electrode configurations was examined in this study. Simulation results show that a wrap-around gate gives the largest gate-to-channel capacitance among the three gate configurations. A bottom gate structure, in which carbon nanotubes are unpassivated, presents a distinct electrostatic disadvantage of the weakest gate control. For a top gate structure, we found that an optimum design point exists for the pitch, which is defined as the distance between the centers of adjacent nanotubes, to get the largest gate capacitance per unit area.
Keywords
arrays; capacitance; carbon nanotubes; electrostatics; field effect transistors; nanotube devices; semiconductor device models; C; bottom gate structure; capacitance; carbon nanotube arrays; carbon nanotube field effect transistors; densely packed array; electrostatic analysis; gate electrode; gate-to-channel capacitance; nanotube array; optimum design point; screening; top gate; wrap-around gate; Capacitance; Carbon nanotubes; Dielectrics; Electrodes; Electrostatic analysis; FETs; Integrated circuit technology; Microelectronics; Research and development; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003. International Conference on
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7826-1
Type
conf
DOI
10.1109/SISPAD.2003.1233662
Filename
1233662
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