• DocumentCode
    2096145
  • Title

    Electrostatic analysis of carbon nanotube arrays

  • Author

    Wang, Xinlin ; Wong, Hon-Sum Philip ; Oldiges, Phil ; Miller, Robert J.

  • Author_Institution
    Microelectron. Div., Semicond. Res. & Dev. Center, Hopewell Junction, NY, USA
  • fYear
    2003
  • fDate
    3-5 Sept. 2003
  • Firstpage
    163
  • Lastpage
    166
  • Abstract
    In order to improve the performance of carbon nanotube field effect transistors (CNFETs), a nanotube array should be used. For a densely packed array of nanotubes, screening by nearby tubes affects the capacitance per tube. The gate-to-channel capacitance for a nanotube array of three different gate electrode configurations was examined in this study. Simulation results show that a wrap-around gate gives the largest gate-to-channel capacitance among the three gate configurations. A bottom gate structure, in which carbon nanotubes are unpassivated, presents a distinct electrostatic disadvantage of the weakest gate control. For a top gate structure, we found that an optimum design point exists for the pitch, which is defined as the distance between the centers of adjacent nanotubes, to get the largest gate capacitance per unit area.
  • Keywords
    arrays; capacitance; carbon nanotubes; electrostatics; field effect transistors; nanotube devices; semiconductor device models; C; bottom gate structure; capacitance; carbon nanotube arrays; carbon nanotube field effect transistors; densely packed array; electrostatic analysis; gate electrode; gate-to-channel capacitance; nanotube array; optimum design point; screening; top gate; wrap-around gate; Capacitance; Carbon nanotubes; Dielectrics; Electrodes; Electrostatic analysis; FETs; Integrated circuit technology; Microelectronics; Research and development; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003. International Conference on
  • Conference_Location
    Boston, MA, USA
  • Print_ISBN
    0-7803-7826-1
  • Type

    conf

  • DOI
    10.1109/SISPAD.2003.1233662
  • Filename
    1233662