Title :
Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures
Author :
Dong, Lixin ; Zhang, Li ; Bell, Dominik J. ; Nelson, Bradley J. ; Grützmacher, Detlev
Author_Institution :
Inst. of Robotics & Intelligent Syst., ETH Zurich
Abstract :
Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoils and Si/Cr nanospirals is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives
Keywords :
chromium; germanium compounds; microactuators; microrobots; microsensors; nanoelectronics; silicon compounds; 3D helical nanostructures; NEMS; Si-Cr nanospirals; SiGe-Si-Cr; SiGe-Si-Cr nanocoils; hybrid nanorobotic; nanoactuators; nanoelectromechanical systems; nanofabrication processes; nanosensors; robotic manipulation; Chromium; Fabrication; Intelligent robots; Nanoelectromechanical systems; Nanofabrication; Nanomaterials; Nanostructures; Nanotechnology; Noise measurement; Robotic assembly;
Conference_Titel :
Robotics and Automation, 2006. ICRA 2006. Proceedings 2006 IEEE International Conference on
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-9505-0
DOI :
10.1109/ROBOT.2006.1641904
