• DocumentCode
    2097394
  • Title

    Direct characterization of ZnO films in composite resonators by the resonance spectrum method

  • Author

    Zhang, Y. ; Wang, Z. ; Cheeke, J.D.N. ; Hickernell, F.S.

  • Author_Institution
    Dept. of Phys., Concordia Univ., Montreal, Que., Canada
  • Volume
    2
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    991
  • Abstract
    A direct method to characterize a piezoelectric film has been developed. Based on the measured resonance spectrum of a composite resonator, the electromechanical coupling coefficient kt2, density and elastic constant C33 D of the piezoelectric film can be derived. Good agreement with experiment was obtained
  • Keywords
    II-VI semiconductors; crystal resonators; density; elastic constants; piezoelectric semiconductors; piezoelectric thin films; semiconductor thin films; zinc compounds; ZnO; composite resonator; density; elastic constant; electromechanical coupling coefficient; piezoelectric film; resonance spectrum; Acoustic measurements; Artificial intelligence; Electrodes; Impedance; Physics; Piezoelectric films; Resonance; Resonant frequency; Substrates; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
  • Conference_Location
    Caesars Tahoe, NV
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-5722-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1999.849158
  • Filename
    849158
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2097394