Self-reciprocal calibration of micromachined capacitance transducers in air

Author

Sun, Liping ; Schindel, David ; Sayer, Michael

Author_Institution

Dept. of Phys., Queen´´s Univ., Kingston, Ont., Canada

Volume

2

fYear

1999

fDate

1999

Firstpage

1133

Abstract

A one-transducer self-reciprocal calibration method has been applied to a micromachined capacitance transducer in air over the frequency range 100 kHz~700 kHz. The corrections for air attenuation and transducer diffraction effects at different frequencies are included in this extended reciprocal calibration technique. The measured receive sensitivities are validated by comparing with results obtained using a three-transducer calibration method. The self-calibration results are also validated by comparing with predictions from a theoretical model for the test transducer

Keywords

calibration; capacitive sensors; micromachining; ultrasonic transducers; 100 to 700 kHz; air attenuation; air-coupled ultrasonic transducer; diffraction effects; micromachined capacitance transducer; one-transducer self-reciprocal calibration; sensitivity; Acoustic measurements; Acoustic transducers; Biomedical transducers; Calibration; Capacitance; Diffraction; Frequency; Transmitters; Ultrasonic transducers; Ultrasonic variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE

Conference_Location

Caesars Tahoe, NV

ISSN

1051-0117

Print_ISBN

0-7803-5722-1

Type

conf

DOI

10.1109/ULTSYM.1999.849198

Filename

849198