Title :
3D simulation of controlled micromachined capacitive ultrasound transducers
Author :
Kaltenbacher, Manfred ; Landes, H. ; Niederer, K. ; Lerch, R.
Author_Institution :
Dept. of Sensor Technol., Erlangen-Nurnberg Univ., Germany
Abstract :
A finite element simulation scheme which allows the efficient calculation of electrostatic transducers immersed in an acoustic fluid is presented. This calculation scheme has been applied in investigations of the dynamical behavior of surface micromachined capacitive ultrasound arrays. In order to improve dynamics and efficiency of such transducers a controller has been designed and tested. Therewith, ring down time and acoustic crosstalk in the array are reduced
Keywords :
capacitive sensors; finite element analysis; micromachining; ultrasonic transducer arrays; 3D finite element simulation; acoustic crosstalk; acoustic fluid; capacitive ultrasound transducer array; controller; electrostatic transducer; ring down time; surface micromachining; Acoustic arrays; Acoustic testing; Acoustic transducers; Crosstalk; Electrostatics; Finite element methods; Fluid dynamics; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849202
