Title :
New results on miniaturised annular arrays built using ultrasound micromachining
Author :
Ballandras, S. ; Maître, P. ; Guine, P. ; Bourriot, N. ; Steichen, W. ; Piranda, B. ; Gelly, J.F.
Author_Institution :
Lab. de Phys. et Metrol. des Oscillateurs Assoc., Univ. de Franche-Comte, Besancon, France
Abstract :
Fabrication and test of a 2 mm diameter 4 channel annular array is described. Comparison between experimentally measured and theoretically predicted admittance of the transducer elements is reported. The theoretical 3D finite element analysis is finally used to identify the electrically measured vibration mode of the device
Keywords :
finite element analysis; micromachining; ultrasonic transducer arrays; 2 mm; 3D finite element analysis; admittance; annular array; fabrication; micromachining; ultrasound transducer; vibration mode; Admittance measurement; Electric variables measurement; Fabrication; Finite element methods; Testing; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers; Ultrasonic variables measurement; Vibration measurement;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849203
