DocumentCode
2098580
Title
Fabrication and improvement of polysilicon microdynamic gear wheels system
Author
Avram, Fiz M. ; Neagoe, Ing O. ; Simion, Fiz M.
Author_Institution
I.C.C.E., Bucharest, Romania
Volume
1
fYear
1996
fDate
9-12 Oct 1996
Firstpage
81
Abstract
The purpose of this research was to design and fabricate a microdynamic system of three polysilicon gear wheels, using a three masks process for silicon microfabrication. The fabrication sequence of the micromechanical system is following the process described by Fan(1988) for micromachining detachable moving parts on silicon substrates. The basis for fabricating of movable parts is the use of sacrificial layers that act as spacers and they also keep the parts attached to the wafer during fabrication
Keywords
chemical vapour deposition; elemental semiconductors; micromachining; micromechanical devices; silicon; substrates; 170 mum; 200 mum; 250 mum; LPCVD; Si; Si microfabrication; Si substrates; fabrication; masks; microdynamic system; micromechanical system; polysilicon gear wheels; polysilicon microdynamic gear wheel; sacrificial layers; spacers; Annealing; Axles; Electrons; Fabrication; Gears; Insulators; Silicon; Stress; Substrates; Wheels;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1996., International
Conference_Location
Sinaia
Print_ISBN
0-7803-3223-7
Type
conf
DOI
10.1109/SMICND.1996.557310
Filename
557310
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