Title :
Improvement of in-line power monitor integration technology for a compact multifunctional silica PLC
Author :
Yamazaki, H. ; Watanabe, K. ; Yanagisawa, M. ; Itoh, M. ; Ogawa, I. ; Kaneko, A.
Author_Institution :
NTT Corp., Atsugi
Abstract :
A chip-scale-packaged photodiode (CSP-PD) for in-line optical power monitoring was integrated on top of a 2.5%-Delta silica-based planar lightwave circuit (PLC) with out-of-plane micromirrors. By using a spotsize converter (SSC) to suppress the beam divergence and by improving the micromirror fabrication process, we obtained a high responsivity of 0.7~ 0.9 A/W.
Keywords :
convertors; integrated optoelectronics; micromirrors; optical planar waveguides; photodiodes; planar waveguides; silicon compounds; SiO2; chip-scale-packaged photodiode; in-line optical power monitoring; out-of-plane micromirrors; planar lightwave circuit; responsivity; spotsize converter; Arrayed waveguide gratings; Integrated optics; Micromirrors; Monitoring; Optical attenuators; Optical refraction; Optical variables control; Optical waveguides; Programmable control; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382333
