Title :
Micromechanical structures with optical detection integrated on silicon
Author :
Müller, Raluca ; Pavelescu, Ioan ; Moagar-Poladian, Victor
Author_Institution :
Inst. of Microtechnol., Bucharest, Romania
Abstract :
We have determined closed form expressions, that can be used as a satisfactory tool for the design and optimisation of optomechanical pressure sensors based on simple membranes with small deflections. The finite element software package ANSYS was used to compare the results. The relative change in the refraction index in the waveguide was calculated using the stress-elastooptical coefficients for SiON given in literature
Keywords :
Mach-Zehnder interferometers; elemental semiconductors; finite element analysis; integrated optoelectronics; microsensors; optical sensors; optical waveguides; photoelasticity; physics computing; pressure sensors; silicon; structural engineering computing; ANSYS; Si; SiON; deflections; design; finite element software package; membranes; micromechanical structures; optical detection; optimisation; optomechanical pressure sensors; refraction index; silicon; stress-elastooptical coefficients; waveguide; Biomembranes; Design optimization; Finite element methods; Integrated optics; Micromechanical devices; Optical detectors; Optical refraction; Optical sensors; Optical waveguides; Software packages;
Conference_Titel :
Semiconductor Conference, 1996., International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3223-7
DOI :
10.1109/SMICND.1996.557312
