DocumentCode
2099280
Title
Design and fabrication of a high performance beam splitter based on the silicon nanowire waveguide
Author
Zhen Sheng ; Zhiqi Wang ; Chao Qiu ; Le Li ; Pang, Ai-Chun ; Aimin Wu ; Xi Wang ; Shichang Zou ; Fuwan Gan
Author_Institution
State Key Lab. of Functional Mater. for Inf., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
fYear
2012
fDate
7-10 Nov. 2012
Firstpage
1
Lastpage
3
Abstract
We present the design, fabrication and measurement of a compact and low loss MMI-based optical beam splitter. The measured excess loss is less than 0.1dB at the wavelength of 1550nm.
Keywords
elemental semiconductors; integrated optics; light interference; nanophotonics; nanowires; optical beam splitters; optical design techniques; optical fabrication; optical loss measurement; optical losses; optical waveguides; silicon; Si; compact MMI-based optical beam splitter; high performance beam splitter; low loss MMI-based optical beam splitter; multimode interference; silicon nanowire waveguide; wavelength 1550 nm;
fLanguage
English
Publisher
ieee
Conference_Titel
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location
Guangzhou
ISSN
2162-108X
Print_ISBN
978-1-4673-6274-0
Type
conf
Filename
6511018
Link To Document