An experimental and numerical study on the intrinsic frequency of micromachined piezoelectric motor stators

The authors describe an analysis of a hybrid stator composed which includes a piezoelectric film and a Si substrate. By using the Rayleigh-Ritz method, the intrinsic frequency behaviours of the actual stators call be calculated with good results. The influence of the stresses including in-plane stress and flexural stress is introduced. In general, this method is accurate, flexible with respect to the boundary conditions and is easy to use. The result shows that the intrinsic frequency is affected by a number of parameters. Although there exists an error between the calculated and experimental values, the simulation provides an excellent agreement with the actual stator