• DocumentCode
    2099955
  • Title

    MEMS Fabry-Pérot Pixels

  • Author

    Toshiyoshi, Hiroshi ; Lo, Chengyao ; Taii, Yusuke ; Fujita, Hiroyuki

  • Author_Institution
    Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, JAPAN. E-mail. hiro@iis.u-tokyo.ac.jp, Tel. +81-3-54526276, Fax. +81-3-54526250
  • fYear
    2007
  • fDate
    21-25 Oct. 2007
  • Firstpage
    284
  • Lastpage
    285
  • Abstract
    Novel Coulomb force controlled color display pixels of tunable MEMS (Micro Electro Mechanical System) Fabry-Pérot interferometer structure on flexible PEN (polyethylene naphthalate) substrate have been demonstrated with optical, electrical, and mechanical characteristics.
  • Keywords
    Displays; Electrodes; Force control; Mechanical systems; Micromechanical devices; Nonhomogeneous media; Optical filters; Optical interferometry; Polyethylene; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
  • Conference_Location
    Lake Buena Vista, FL, USA
  • ISSN
    1092-8081
  • Print_ISBN
    978-1-4244-0925-9
  • Electronic_ISBN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/LEOS.2007.4382388
  • Filename
    4382388
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2099955