Development of a calculable capacitor

Author

Wang, Yicheng ; Lee, Rae Duk ; Koffman, Andrew ; Durand, Mathieu ; Lawall, John ; Pratt, Jon

Author_Institution

Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA

fYear

2011

fDate

10-12 May 2011

Firstpage

1

Lastpage

3

Abstract

This paper summarizes the current NIST effort to manufacture a new calculable capacitor, focusing on issues associated with the fabrication of the main electrodes and their alignment as well as development of a high resolution Fabry-Perot interferometer system for displacement measurements of the calculable capacitor. Results presented here for diamond turned aluminum electrodes show useable profiles that deviate from straight by less than 25 nm. We have also achieved a fractional uncertainty of ~1.25×10^-9 for displacement measurements without any optical frequency standard.

Keywords

Fabry-Perot interferometers; capacitance measurement; capacitors; displacement measurement; electrodes; measurement standards; Fabry-Perot interferometer; NIST; calculable capacitor; diamond turned aluminum electrodes; displacement measurements; fabrication; optical frequency standard; Cavity resonators; Coordinate measuring machines; Electrodes; Fiber lasers; Measurement by laser beam; Optical interferometry; Optical variables measurement; calculable capacior; interferometers;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference (I2MTC), 2011 IEEE

Conference_Location

Binjiang

ISSN

1091-5281

Print_ISBN

978-1-4244-7933-7

Type

conf

DOI

10.1109/IMTC.2011.5944257

Filename

5944257