Title :
Spectrometer-on-a-chip based on echelle diffraction grating in SiON waveguides
Author :
Xiao Ma ; Mingyu Li ; Jian-Jun He
Author_Institution :
State Key Lab. of Modern Opt. Instrum., Zhejiang Univ., Hangzhou, China
Abstract :
We demonstrate a spectrometer-on-a-chip based on echelle diffraction grating (EDG) in silicon oxynitride (SiON) waveguides for operation in 850nm wavelength range. The chip comprises 120 output waveguides with 0.25 nm spacing and has a size of only 11mm×6mm. The measured adjacent channel crosstalk is close to 30 dB, the 3dB channel bandwidth is ≪ 0.1 nm and the channel non-uniformity is 3dB for wavelength from 838nm to 852nm.
Keywords :
diffraction gratings; integrated optics; optical waveguides; silicon compounds; spectrometers; SiON; adjacent channel crosstalk; channel bandwidth; channel nonuniformity; echelle diffraction grating; silicon oxynitride waveguides; size 11 mm; size 6 mm; spectrometer-on-a-chip; wavelength 838 nm to 852 nm; SiON waveguides; echelle grating; planar waveguide grating; sensing; spectrometer-on-a-chip;
Conference_Titel :
Communications and Photonics Conference and Exhibition, 2011. ACP. Asia
Conference_Location :
Shanghai
Print_ISBN :
978-0-8194-8961-6
