Title :
Displacement Sensing with a Mechanically Tunable Photonic Crystal
Author :
Hadzialic, Sanja ; Kim, Sora ; Sudbo, Aasmund ; Solgaard, Olav
Author_Institution :
Univ. Graduate Center, Kjeller
Abstract :
We demonstrate a mechanically tunable photonic crystal designed for highly position sensitive reflection. Our measurements show that the reflectivity changes from 5.8 to 69% for a 90 nm displacement.
Keywords :
displacement measurement; micro-optomechanical devices; microsensors; optical sensors; photonic crystals; MEMS; displacement sensing; photonic crystal; position sensitive reflection; reflectivity; Biomembranes; Etching; Optical coupling; Optical devices; Optical modulation; Optical reflection; Optical sensors; Photonic crystals; Reflectivity; Silicon;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382419
