DocumentCode
2100696
Title
Displacement Sensing with a Mechanically Tunable Photonic Crystal
Author
Hadzialic, Sanja ; Kim, Sora ; Sudbo, Aasmund ; Solgaard, Olav
Author_Institution
Univ. Graduate Center, Kjeller
fYear
2007
fDate
21-25 Oct. 2007
Firstpage
345
Lastpage
346
Abstract
We demonstrate a mechanically tunable photonic crystal designed for highly position sensitive reflection. Our measurements show that the reflectivity changes from 5.8 to 69% for a 90 nm displacement.
Keywords
displacement measurement; micro-optomechanical devices; microsensors; optical sensors; photonic crystals; MEMS; displacement sensing; photonic crystal; position sensitive reflection; reflectivity; Biomembranes; Etching; Optical coupling; Optical devices; Optical modulation; Optical reflection; Optical sensors; Photonic crystals; Reflectivity; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location
Lake Buena Vista, FL
ISSN
1092-8081
Print_ISBN
978-1-4244-0925-9
Electronic_ISBN
1092-8081
Type
conf
DOI
10.1109/LEOS.2007.4382419
Filename
4382419
Link To Document