Thin film PZT pressure/temperature sensory arrays for on-line monitoring of injection molding

This paper presents research of depositing lead-zirconate-titanate (PbZrTiO₃, PZT) on Pt/Ti/SiO₂/Si substrates by RF-magnetron sputtering and developing the integrated PZT pressure sensory array and a thin film resistance temperature detector (RTD) for on-line monitoring of injection molding. A novel fabrication procedure was established through a steel mask to deposit the pattern directly on the substrate by sputtering. The direct deposition method is used to integrate the PZT pressure array sensors and k-type thermocouple on silicon or steel substrate for on-line monitoring of injection molding. Utilizing a steel mask directly produces a microsensor pattern on the steel substrate, one can neglect the intermediate steps such as photolithography and etching, as a result, a great deal of time can be saved during the process. In order to fabricate pressure sensory arrays, the PZT thin film was deposited on silicon and steel substrate at 300°C by RF-magnetron sputtering and was annealed at 650°C for 60 minutes in oxygen