• DocumentCode
    2101369
  • Title

    Dual SAW oscillator for low SO2 concentrations measurement

  • Author

    Bodea, Emil ; Blaga, Iuliu ; Apostolescu, Radu ; Schiopu, Paul

  • Author_Institution
    R&D Inst. for Electr. Eng., Bucharest, Romania
  • Volume
    1
  • fYear
    1996
  • fDate
    9-12 Oct 1996
  • Firstpage
    121
  • Abstract
    A device for surface acoustic wave (SAW) measurements, based on an organic sensitive film, that is triethanolamine (TEA), has been realized. A dual SAW oscillator was used to measure the frequency shift due to gas adsorption in the TEA film. A linear response was obtained in the range 0-100 ppm SO2 and the sensibility was about 80 Hz/ppm
  • Keywords
    chemical variables measurement; gas sensors; sulphur compounds; surface acoustic wave oscillators; surface acoustic wave sensors; SAW measurement; SO2; TEA film; dual SAW oscillator; frequency shift; gas adsorption; linear response; low SO2 concentrations measurement; organic sensitive film; surface acoustic wave measurements; triethanolamine; Electrodes; Fingers; Oscillators; Resists; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 1996., International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-3223-7
  • Type

    conf

  • DOI
    10.1109/SMICND.1996.557320
  • Filename
    557320
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2101369