Title :
Sensitivities of surface acoustic wave sensors based on fine grain ceramics
Author :
Feuillard, G. ; Janin, Y. ; Teston, F. ; Tessier, L. ; Lethiecq, M.
Author_Institution :
GIP Ultrasons, EIT, Tours, France
Abstract :
The mass sensitivity for the Rayleigh surface wave of four piezoceramics, two modified lead titanates and two lead zirconate titanates is determined from the measurement of the phase shift of a SAW delay line when a thin aluminium film is vapoured on the surface. Mass sensitivities of 1.0-3 (Hz/MHz2)/(ng/cm2) at 25 MHz are found for the modified lead titanate ceramics and agree with theory. These results are discussed, and compared to the mass sensitivities of single crystals. They show that ceramics, which operate at lower frequencies, can compete with single crystals in gravimetric sensor applications
Keywords :
Rayleigh waves; density measurement; lead compounds; piezoceramics; surface acoustic wave delay lines; surface acoustic wave sensors; weighing; 25 MHz; PZT; PbTiO3; PbZrO3TiO3; Rayleigh surface wave; SAW delay line; device modelling; fine grain ceramic based; gravimetric sensor; intrinsic sensitivity; mass sensitivity; modified ceramics; phase shift; piezoceramics; short circuit response; surface acoustic wave sensors; velocity shift; Acoustic measurements; Acoustic sensors; Acoustic waves; Ceramics; Crystals; Delay lines; Phase measurement; Piezoelectric materials; Surface acoustic waves; Titanium compounds;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1996. IMTC-96. Conference Proceedings. Quality Measurements: The Indispensable Bridge between Theory and Reality., IEEE
Conference_Location :
Brussels
Print_ISBN :
0-7803-3312-8
DOI :
10.1109/IMTC.1996.507564
