DocumentCode :
2102566
Title :
Nanoscale Resolution Microscopy and Ablation with Extreme Ultraviolet Lasers
Author :
Menoni, C.S. ; Brizuela, F. ; Brewer, C. ; Bravo, H. ; Langdon, B. ; Martz, D. ; Vaschenko, G. ; Luther, B. ; Marconi, M.C. ; Rocca, J.J. ; Chao, W. ; Anderson, E.H. ; Attwood, D.T. ; Vinogradov, A.V. ; Artioukov, I.A. ; Pershyn, Y.P. ; Kondratenko, V.V.
Author_Institution :
Colorado State Univ., Fort Collins
fYear :
2007
fDate :
21-25 Oct. 2007
Firstpage :
488
Lastpage :
489
Abstract :
We obtain a spatial resolution down to 38 nm with full field imaging and laser-ablation systems that exploit the short wavelength and high brightness output from compact extreme ultraviolet lasers in combination with zone plate optics.
Keywords :
laser ablation; microscopy; nanotechnology; zone plates; extreme ultraviolet lasers; full field imaging systems; laser ablation; nanoscale resolution microscopy; zone plate optics; Focusing; Laser ablation; Laser theory; Optical microscopy; Optical pumping; Optical sensors; Pump lasers; Spatial resolution; Surface emitting lasers; Ultraviolet sources;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
ISSN :
1092-8081
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
Type :
conf
DOI :
10.1109/LEOS.2007.4382492
Filename :
4382492
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2102566
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