Title :
Holographic nano-imaging realized with compact extreme ultraviolet lasers
Author :
Marconi, M.C. ; Wachulak, P.W. ; Bartels, R.A. ; Menoni, C.S. ; Rocca, J.J.
Author_Institution :
Colorado State Univ., Fort Collins
Abstract :
Table top nano-holography with EUV laser was demonstrated. The hologram was recorded in a photoresist and digitized with an AFM. The image was reconstructed achieving 164 nm lateral resolution determined using wavelet analysis and image correlation.
Keywords :
atomic force microscopy; holography; image reconstruction; laser beam applications; optical correlation; optical images; photoresists; wavelet transforms; AFM; EUV laser; extreme ultraviolet lasers; hologram; holographic nano-imaging; image correlation; image reconstruction; photoresist; table top nano-holography; wavelength 164 nm; wavelet analysis; High-resolution imaging; Holography; Image analysis; Image reconstruction; Image resolution; Laser theory; Resists; Spatial resolution; Ultraviolet sources; Wavelet analysis;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382493
