DocumentCode
2102705
Title
POEM: A fast defocus estimation method for scanning transmission electron microscopy
Author
Tejada, Arturo ; Den Dekker, Arnold J.
Author_Institution
Delft Center for Syst. & Control, Delft Univ. of Technol., Delft, Netherlands
fYear
2011
fDate
10-12 May 2011
Firstpage
1
Lastpage
5
Abstract
The defocus polar rose estimation method (POEM) is introduced here as an alternative method for defocus estimation in scanning transmission electron microscopy. Its principle of operation is discussed in detail along with the results of initial simulation-based performance tests. The results show that POEM can attain a precision similar to that of equivalent methods in the literature but using significantly less data, thus increasing the defocus estimation speed significantly.
Keywords
image processing; scanning electron microscopy; transmission electron microscopy; POEM; defocus estimation method; equivalent methods; polar rose estimation method; scanning transmission electron microscopy; Adaptive optics; Correlation; Estimation; Lenses; Optical imaging; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference (I2MTC), 2011 IEEE
Conference_Location
Binjiang
ISSN
1091-5281
Print_ISBN
978-1-4244-7933-7
Type
conf
DOI
10.1109/IMTC.2011.5944345
Filename
5944345
Link To Document