Title :
POEM: A fast defocus estimation method for scanning transmission electron microscopy
Author :
Tejada, Arturo ; Den Dekker, Arnold J.
Author_Institution :
Delft Center for Syst. & Control, Delft Univ. of Technol., Delft, Netherlands
Abstract :
The defocus polar rose estimation method (POEM) is introduced here as an alternative method for defocus estimation in scanning transmission electron microscopy. Its principle of operation is discussed in detail along with the results of initial simulation-based performance tests. The results show that POEM can attain a precision similar to that of equivalent methods in the literature but using significantly less data, thus increasing the defocus estimation speed significantly.
Keywords :
image processing; scanning electron microscopy; transmission electron microscopy; POEM; defocus estimation method; equivalent methods; polar rose estimation method; scanning transmission electron microscopy; Adaptive optics; Correlation; Estimation; Lenses; Optical imaging; Transmission electron microscopy;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2011 IEEE
Conference_Location :
Binjiang
Print_ISBN :
978-1-4244-7933-7
DOI :
10.1109/IMTC.2011.5944345
