Fabrication of complimentary single-electron inverter in single-wall carbon nanotubes

Single-electron devices (SEDs) based on Coulomb blockade (CB) effects have prominent features in terms of ultra-low power consumption and miniaturization to a molecular scale. The performance of the device gets better as the dot size gets small because they rely on the classical CB effect. The single-wall carbon nanotube (SWNT) is attractive material as a building block of SEDs because of the extremely small diameter of a few nanometers. In this paper, we report on the fabrication of the complimentary single-electron inverter an elemental device for the single electron logic (J.R. Tucker, J. Appl. Phys. vol. 72, p. 4399, 1992), and show the electrical performance in the temperature range from 1.5 K to 10 K.