• DocumentCode
    2102947
  • Title

    A study of leaky SAW on piezoelectric substrate with high coupling factor

  • Author

    Endoh, G. ; Kawachi, O. ; Ueda, Makoto

  • Author_Institution
    Fujitsu Labs. Ltd., Kawasaki, Japan
  • Volume
    1
  • fYear
    1999
  • fDate
    17-20 Oct. 1999
  • Firstpage
    309
  • Abstract
    Performance of the leaky SAW on rotated Y-X LiNbO3 with a heavy electrode is presented. The characteristics of propagation loss, phase velocity, and electromechanical coupling factor of the rotated Y-X LiNbO3 substrate with several electrode thicknesses were simulated. Experimental results using a delay line confirm the theoretical calculation. The optimal rotation angle shifts from conventionally 64° to a higher angle with the heavy electrode. Performance of the SAW on rotated Y-X LiNbO3 is strongly dependent upon Al film thickness.
  • Keywords
    lithium compounds; substrates; surface acoustic wave delay lines; Al film thickness; LiNbO3; coupling factor; delay line; electromechanical coupling factor; heavy electrode; leaky SAW; phase velocity; piezoelectric substrate; propagation loss; rotated Y-X LiNbO3; rotation angle; Artificial intelligence; Delay lines; Electrodes; Gratings; Propagation losses; Radio frequency; SAW filters; Substrates; Surface acoustic wave devices; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
  • Conference_Location
    Caesars Tahoe, NV
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-5722-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1999.849408
  • Filename
    849408
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2102947