Title :
A study of leaky SAW on piezoelectric substrate with high coupling factor
Author :
Endoh, G. ; Kawachi, O. ; Ueda, Makoto
Author_Institution :
Fujitsu Labs. Ltd., Kawasaki, Japan
Abstract :
Performance of the leaky SAW on rotated Y-X LiNbO3 with a heavy electrode is presented. The characteristics of propagation loss, phase velocity, and electromechanical coupling factor of the rotated Y-X LiNbO3 substrate with several electrode thicknesses were simulated. Experimental results using a delay line confirm the theoretical calculation. The optimal rotation angle shifts from conventionally 64° to a higher angle with the heavy electrode. Performance of the SAW on rotated Y-X LiNbO3 is strongly dependent upon Al film thickness.
Keywords :
lithium compounds; substrates; surface acoustic wave delay lines; Al film thickness; LiNbO3; coupling factor; delay line; electromechanical coupling factor; heavy electrode; leaky SAW; phase velocity; piezoelectric substrate; propagation loss; rotated Y-X LiNbO3; rotation angle; Artificial intelligence; Delay lines; Electrodes; Gratings; Propagation losses; Radio frequency; SAW filters; Substrates; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849408
